Femtosecond laser fabrication of high reflectivity micromirrors

Autor(en)

Daniel Brodoceanu, Garrett Cole, Nikolai Kiesel, Markus Aspelmeyer, Dieter Bäuerle

Abstrakt

High-quality freestanding micromirrors consisting of 40 dielectric layers on silicon have been fabricated by ultrashort-pulse laser ablation in combination with laser-assisted wet chemical etching. Backside material removal enables direct access to both faces of the dielectric coating. The amplitude reflectance of the micromirrors has been determined by Fabry-Peacuterot interferometry; a finesse in excess of 8900 +/- 700, corresponding to a reflectivity exceeding 99.95%, has been found. The mechanical quality factor, Q, of the microresonators, measured at 20 K, is determined to be between 5000 and 6000.

Organisation(en)

Quantenoptik, Quantennanophysik und Quanteninformation

Externe Organisation(en)

Johannes Kepler Universität Linz

Journal

Applied Physics Letters

Band

97

Anzahl der Seiten

3

ISSN

0003-6951

DOI

https://doi.org/10.1063/1.3467846

Publikationsdatum

2010

Peer-reviewed

Ja

ÖFOS 2012

103026 Quantenoptik, 210006 Nanotechnologie, 103025 Quantenmechanik, 203017 Mikromechanik

Link zum Portal

https://ucrisportal.univie.ac.at/de/publications/ba756e13-0579-4d49-a108-ade45deb9fd8