Surface planarization and masked ion-beam structuring of YBa₂Cu₃O₇ thin films

Autor(en)

Johannes D. Pedarnig, Khurram Siraj, Marius Bodea, Ionut Puica, Wolfgang Lang, R. Kolarova, Peter Bauer, Klaus Haselgrübler, Christine Hasenfuss, Igor Beinik, Christian Teichert

Abstrakt

Surface planarization and masked ion-beam structuring (MIBS) of high-T_c superconducting (HTS) YBa₂Cu₃O_7-δ (YBCO) thin films grown by pulsed-laser deposition (PLD) method is reported. Chemical-mechanical polishing, plasma etching, and oxygen annealing of YBCO films strongly reduce the particulate density (~ 10^-2 x) and surface roughness (~ 10^-1 x) of as-grown PLD layers. The resistivity, critical temperature T-c approximate to 90 K and critical current density J_c (77 K)> 1 MA/cm² of films are not deteriorated by the planarization procedure. The YBCO films are modified and patterned by irradiation with He ions of 75 key energy. Superconducting tracks patterned by MIBS without removal of HIS material and, for comparison, by wet-chemical etching show same T_c and J_c(T) values. Different micro- and nano-patterns are produced in parallel on planarized films. The size of irradiated pattern depends on the mask employed for beam shaping and features smaller than 70 nm are achieved.

Organisation(en)

Elektronische Materialeigenschaften

Externe Organisation(en)

Johannes Kepler Universität Linz, Montanuniversität Leoben

Journal

Thin Solid Films

Band

518

Seiten

7075-7080

Anzahl der Seiten

6

ISSN

0040-6090

DOI

https://doi.org/10.1016/j.tsf.2010.07.021

Publikationsdatum

2010

Peer-reviewed

Ja

ÖFOS 2012

1030 Physik, Astronomie

Link zum Portal

https://ucrisportal.univie.ac.at/de/publications/9367dd5e-6cb9-4e62-be89-77f1c294de14