Nano-patterning of cuprate superconductors by masked He⁺ ion irradiation:3-dimensional profiles of the local critical temperature

Autor(en)

Kristijan Luka Mletschnig, Wolfgang Lang

Abstrakt

Irradiation of cuprate high-T_c superconductors with light ions of moderate energy creates point defects that lead to a reduction or full suppression of the critical temperature. By shaping the ion flux with a stencil mask, nanostructures for emerging superconducting electronics can be fabricated. The 3-dimensional shape of such defect landscapes is examined, based on calculations of full collision cascades and atom displacements. A relation between the calculated defect density and experimental values of the critical temperature in thin
YBa₂Cu₃O_7−δ films is etablished that allows to determine the distribution of local T_c’s and its 3-dimensional visualization. The results confirm that, using 75 keV He⁺ ion irradiation and a stencil mask, well-defined patterns of non-superconducting material in the superconducting matrix can be produced with low blurring.

Organisation(en)

Elektronische Materialeigenschaften

Journal

Microelectronic Engineering

Band

215

Anzahl der Seiten

6

ISSN

0167-9317

DOI

https://doi.org/10.1016/j.mee.2019.110982

Publikationsdatum

05-2019

Peer-reviewed

Ja

ÖFOS 2012

103033 Supraleitung, 210006 Nanotechnologie

Schlagwörter

ASJC Scopus Sachgebiete

Electronic, Optical and Magnetic Materials, Condensed Matter Physics, Surfaces, Coatings and Films, Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

Link zum Portal

https://ucrisportal.univie.ac.at/de/publications/79c19c20-4bb3-46d6-84e6-b32ad8645315