Controlling Catalyst Bulk Reservoir Effects for Monolayer Hexagonal Boron Nitride CVD

Autor(en)

Sabina Caneva, Robert S. Weatherup, Bernhard C. Bayer, Raoul Blume, Andrea Cabrero-Vilatela, Philipp Braeuninger-Weirner, Marie-Blandine Martin, Ruizhi Wang, Carsten Baehtz, Robert Schloegl, Jannik C. Meyer, Stephan Hofmann

Abstrakt

Highly controlled Fe-catalyzed growth of monolayer hexagonal boron nitride (h-BN) films is demonstrated by the dissolution of nitrogen into the catalyst bulk via NH3 exposure prior to the actual growth step. This "pre-filling" of the catalyst bulk reservoir allows us to control and limit the uptake of B and N species during borazine exposure and thereby to control the incubation time and h-BN growth kinetics while also limiting the contribution of uncontrolled precipitation-driven h-BN growth during cooling. Using in situ X-ray diffraction and in situ X-ray photoelectron spectroscopy combined with systematic growth calibrations, we develop an understanding and framework for engineering the catalyst bulk reservoir to optimize the growth process, which is also relevant to other 2D materials and their heterostructures.

Organisation(en)

Physik Nanostrukturierter Materialien

Externe Organisation(en)

University of Cambridge, Lawrence Berkeley National Laboratory, Helmholtz-Zentrum Berlin für Materialien und Energie, Helmholtz-Zentrum Dresden-Rossendorf, Fritz-Haber-Institut der Max-Planck-Gesellschaft

Journal

Nano Letters: a journal dedicated to nanoscience and nanotechnology

Band

16

Seiten

1250-1261

Anzahl der Seiten

12

ISSN

1530-6984

DOI

https://doi.org/10.1021/acs.nanolett.5b04586

Publikationsdatum

02-2016

Peer-reviewed

Ja

ÖFOS 2012

103015 Kondensierte Materie, 103018 Materialphysik

Schlagwörter

ASJC Scopus Sachgebiete

Condensed Matter Physics, Mechanical Engineering, Bioengineering, Allgemeine Chemie, Allgemeine Materialwissenschaften

Link zum Portal

https://ucrisportal.univie.ac.at/de/publications/4ffc4ef2-85af-45b7-bd24-e814967a2a7f