Roadmap for focused ion beam technologies

Autor(en)

Katja Höflich, Gerhard Hobler, Frances I. Allen, Tom Wirtz, Gemma Rius, Lisa McElwee-White, Arkady V. Krasheninnikov, Matthias Schmidt, Ivo Utke, Nico Klingner, Markus Osenberg, Rosa Córdoba, Flyura Djurabekova, Ingo Manke, Philip Moll, Mariachiara Manoccio, José María De Teresa, Lothar Bischoff, Johann Michler, Olivier De Castro, Anne Delobbe, Peter Dunne, Oleksandr V. Dobrovolskiy, Natalie Frese, Armin Gölzhäuser, Paul Mazarov, Dieter Koelle, Wolfhard Möller, Francesc Pérez-Murano, Patrick Philipp, Florian Vollnhals, Gregor Hlawacek

Abstrakt

The focused ion beam (FIB) is a powerful tool for fabrication, modification, and characterization of materials down to the nanoscale. Starting with the gallium FIB, which was originally intended for photomask repair in the semiconductor industry, there are now many different types of FIB that are commercially available. These instruments use a range of ion species and are applied broadly in materials science, physics, chemistry, biology, medicine, and even archaeology. The goal of this roadmap is to provide an overview of FIB instrumentation, theory, techniques, and applications. By viewing FIB developments through the lens of various research communities, we aim to identify future pathways for ion source and instrumentation development, as well as emerging applications and opportunities for improved understanding of the complex interplay of ion-solid interactions. We intend to provide a guide for all scientists in the field that identifies common research interest and will support future fruitful interactions connecting tool development, experiment, and theory. While a comprehensive overview of the field is sought, it is not possible to cover all research related to FIB technologies in detail. We give examples of specific projects within the broader context, referencing original works and previous review articles throughout.

Organisation(en)

Nanomagnetismus und Magnonik

Externe Organisation(en)

Ferdinand-Braun-Institut, Technische Universität Wien, University of California, Berkeley, Luxembourg Institute of Science and Technology, Institute of Microelectronics of Barcelona (CSIC), University of Florida, Gainesville, Helmholtz-Zentrum Dresden-Rossendorf, Helmholtz-Zentrum für Umweltforschung, Eidgenössische Materialprüfungs- und Forschungsanstalt, Helmholtz-Zentrum Berlin für Materialien und Energie, Universitat de València, University of Helsinki, Max-Planck-Institut für Struktur und Dynamik der Materie, CNR-NANOTEC Institute of Nanotechnology, Universidad de Zaragoza, Orsay Physics S. A., Institut de Physique et Chimie des Matériaux de Strasbourg (IPCMS), Universität Bielefeld, Raith GmbH, Eberhard Karls Universität Tübingen, Innovations-Institut für Nanotechnologie und korrelative Mikroskopie – INAM e.V.

Journal

Applied Physics Reviews

Band

10

Anzahl der Seiten

93

DOI

https://doi.org/10.1063/5.0162597

Publikationsdatum

12-2023

Peer-reviewed

Ja

ÖFOS 2012

103033 Supraleitung, 103042 Elektronenmikroskopie, 210004 Nanomaterialien

ASJC Scopus Sachgebiete

Allgemeine Physik und Astronomie

Link zum Portal

https://ucrisportal.univie.ac.at/de/publications/17f72ccf-cf62-4951-b663-3766e4674678